Simulation and control of semiconductor production lines

Dieter Armbruster
Arizona State University

A semiconductor fab is arguably one of the most sophisticated and most expensive industrial production facility. Running it in a profitable way requires fast simulation tools as well as control and optimization. We will present aggregate models for such a production line in the form of nonlocal nonlinear partial differential equations. Their validation will be discussed. Multiscale control procedures involving discrete and continuous controls are presented.

Presentation (PDF File)

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